Part of the Oxford Instruments Group
Expand
Oxford Instruments
Applications
Products
News
Events
Contact
SustainabilityInvestorsCareersNewsEventsContact
Investors Careers
About Us
New FacilityOur FacilityNewsEventsSolutions for ProductionSolutions for ResearchSustainability
Applications
2D MaterialsAugmented RealityBiomedical DevicesFailure AnalysisHBLEDs
MEMS & SensorsInfrared SensorsLasersMicroLEDs
Power DevicesQuantum TechnologyRF DevicesVCSELs
Technologies
Plasma EtchingReactive Ion EtchingRIE-PEICP RIE EtchingDeep Reactive Ion EtchingPlasma Polish Dry Etch
Ion Beam
Ion Beam DepositionIon Beam Etching
Plasma deposition
PECVDICPCVDCVD
Atomic scale
Atomic Layer DepositionAtomic Layer EtchingAtomic Scale Processing
Products
ICP RIE EtchPlasmaPro 80 ICPPlasmaPro 100 Cobra ICPPlasmaPro 100 Cobra GaAs VCSELPlasmaPro 100 Polaris ICPRIEPlasmaPro 80 RIEPlasmaPro 100 RIEPlasmaPro 800 RIE
Deep Si Etch
PlasmaPro 100 Estrelas DSiE
PECVDPlasmaPro 80 PECVDPlasmaPro 100 PECVDPlasmaPro 800 PECVDICPCVDPlasmaPro 100 ICPCVDCVDPlasmaPro 100 Nano CVD
ALDAtomfab ALDPlasmaPro ASPFlexAL ALD
ALE
PlasmaPro 100 ALEPlasmaPro 100 ALE and Etchpoint
Ion Beam
Ionfab IBEIonfab IBD
Software
PTIQ SoftwareSECS/GEM Software
Semi Interface Autumn 2024 - Oxford Instruments Plasma Technology
Library
BlogSemi Interface Spring 2025 MagazineSemi Interface Autumn 2024 MagazineProcess NewsVideosWebinarsWhite PapersCase StudiesCustomer GalleryCustomer Publications
Support
Service & Support
Service AgreementsProcess SolutionsRemote SupportUpgrades & SoftwarePTIQ SoftwareSparesService Blog & FAQs
Technical Training CoursesLevel 1 (Introductory) CoursesLevel 2 (Intermediate) CoursesLevel 3 (Advanced) CoursesSpecialist Modules
Raise a Support Ticket
Contact Us
Oxford Instruments - TSIA STAR Awards Finalist
Contact Us
Shop
UKEuropeUS & CanadaAsiaJapan
News
Events
Contact
eCommerce
  1. Home
  2. Events

Plasma Technology Events

Jun
22
AVS ALD/ALE 2025

Jeju Island / South Korea
Jun
24
World of Quantum 2025

Messe Muenchen GmbH, Munich, Germany
View More
Investor relations
See more Investor information

© Oxford Instruments 2025

Website by Miramar Communications Ltd
OSZAR »